Photomasks for various applications

3D Mask (Gray-tone Mask)

Toppan is providing high resolution, highly reliable photomasks not only for semiconductors, but also for different industrial areas / research purposes, utilizing its microfabrication technology.

Use of the Photomask

[Mask for FC-BGA Substrate]

Toppan provides photomasks to various markets including industry, R&D, etc.

＜Instances of Supply＞

Masks for MEMS
Mask for IC bump packaging
Masks for Semiconductor Packaging Substrates
Masks for LED
Masks for Thermal Head
Mask for Device Accuracy control
Test Chart
Master masks for High-resolution Printing
Masks for various R&D etc.

Please make inquiries for more information.

Specification Outline

■Mask Size	5inch x 5inch (127.0 mm x 127.0 mm) , 6inch x 6inch (152.4 mm x 152.4 mm) Please contact us about other sizes.
■Acceptable Data Format	GDS, GBR, or Design diagram
■Substrate, etc.	Synthetic Quarts, Soda-lime Glass / Thickness: 0.09～0.25 inch (t) Pellicle mounting possible

TOPPAN Test Chart

TOPPAN Test Chart is the photomask which formed the basic-shaped pattern with chromium on the high purity glass substrate.
We prepare for a positive type mask and a negative type mask.
It is available in the uses such as accuracy management of equipment, a resolution check, and a valuation basis at photoresist selection.

Standard Mask Pattern

In addition to the above standard products, we can also produce custom models.

Click here to download "TOPPAN Test Chart brochure"(PDF:558KB)

3D Masks (Gray-tone Masks / Gray-scale Masks)

Gray-scale mask is a 3D photomask, applying the well-established photomask technology including high resolution. 3D structures including micro lens are formed by controlling transmission volume of the light.